Different Micromachining Processes of Fabrication For Micro-Electromechanical Systems
Authors : Mr. Yogesh M.Motey , Ms. Purnashti A. Bhosale Abstract—Microelectromechanical systems or MEMS are integrated micro devices or systems combining electrical/ electro and mechanical components. The fast development of MEMS technology has brought many great ideas and development of physical, chemical and biological sensors. . If semiconductor microfabrication was contemplated to be the first micro-manufacturing revolution, […]
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