Authors : Mr. Yogesh M.Motey , Ms. Purnashti A. Bhosale
Abstract—Microelectromechanical systems or MEMS are integrated micro devices or systems combining electrical/ electro and mechanical components. The fast development of MEMS technology has brought many great ideas and development of physical, chemical and biological sensors. . If semiconductor microfabrication was contemplated to be the first micro-manufacturing revolution, MEMS is the second revolution. The paper reflects the results of a study about the state of the art of this technology. In this paper review of processes like Surfacemicromachining, Bulk micromachining, LIGA micromachining and laser micromachining is done for showing features and comparison of each.
